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TWEEZERS

PATENTED
WINGED TWEEZERS
PTW-01~42
SUS304 STAINLESS
PT-01~15
SMD TWEEZERS
PT-18~27
TITANIUM TWEEZERS
(Perfect Anti-magnetic)
PTN-01~04
STAINLESS TWEEZERS
PTS-01~08
TWEEZERS SOFT CASE
PTK-90
WAFER HANDLING
PTZ-01
PLASTIC TIPPED TWEEZERS NEW
PTZ-40. 41. 42
 
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  WAFER HANDLING TWEEZERS

PTZ-01

 

High-tech, advanced manufactured silicon wafer handling tweezers
made with the purest silicon-n carbide parts (SiC)

● Body - Titanium alloy
・Light weight
・Anti-magnetic
・Non-corrosive
● Tip - SiC (Hydrosilicon)
・Extra high purity at PPb level
・Anti-static
・Anti-chemical
・Heat resistant

● Max. 8-inch diameter wafer holdable

 
●Tip Dimensions
A:11㎜ B:9㎜ C:2㎜ D:3.6㎜ E:2.4㎜
● Length : 150 mm
 

                                                ■Characteristics

Item Features
Density (kg/M3) 3.21×10*3
Bending moment  (kgf/mm2) 80
Tensil stress (kgf/mm2) 60
Young's modules (kgf/mm2) 50,000
Hardness (kgf/mm2) HK:3,500
Coefficient of linear exp ansion
(I/℃)
4.5×10*-6
Heat conductivity (cal/cm・s・℃) 0.16
Specific resistance  (Ω・m) 100

(※) Figures at room temperature

 

                         ■No-Corrosion

Conditions Temp. Time Weight change
6N HCI Boiling Point
(110)
1470 h none
9N HNO3 Boiling Point
(116)
1470 h
19N H2SO4 Boiling Point
(128)
1470 h
Nitric acid 17%HF.
83%HNO3
Room Temp 532 h
     
Aqua regia 80℃ 186 h

 
Atmosphere 1500℃ 146 h none
HCIG gas 1200℃ 25 h
 

                                    ■Impurity contained

Element Density (unit: ppb)
Cu <100
K <60
Mo <40
Fe 35
Cr 26
Zn 9
Mn 9
W < 4
Na < 2
Co 1.3
La 0.8
Ag 0.8
Hf 0.32
Au <0.09
Sc <0.01
 
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